Articles | Volume 9, issue 1
https://doi.org/10.5194/ms-9-161-2018
https://doi.org/10.5194/ms-9-161-2018
Research article
 | 
26 Mar 2018
Research article |  | 26 Mar 2018

Design and development of a novel monolithic compliant XY stage with centimeter travel range and high payload capacity

Shixun Fan, Hua Liu, and Dapeng Fan

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Cited articles

Awtar, S.: Synthesis and Analysis of Parallel Kinematic XY Flexure Mechanisms, Department of Mechanical Engineering, Massachusetts Institute of Technology, USA, 198 pp., 2004. 
Awtar, S., Slocum, A. H., and Sevincer, E.: Characteristics of Beam-Based Flexure Modules, J. Mech. Design, 129, 625–639, https://doi.org/10.1115/1.2717231, 2007. 
Chen, H. T. H., Ng, W., and Engelstad, R. L.: Finite element analysis of a scanning x-ray microscope micropositioning stage, Rev. Sci. Instrum., 63, 591–594, https://doi.org/10.1063/1.1142713, 1992. 
Furlani E. P.: Permanent Magnet and Electromechanical Devices, Academic Press, New York, USA, 2001. 
Hao, G.: Creative design and modelling of large-range translation compliant parallel manipulators, Ph.D. thesis, School of Engineering and Physical Sciences, Heriot-Watt University, UK, 190 pp., 2011. 
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Short summary
This article proposes a novel monolithic compliant spatial parallel XY stage (SPXYS). An important feature of the SPXYS lies in that it can deliver centimeter travel range and sustain large out-of-plane payload while possessing a compact structure, which makes the SPXYS suitable for some special applications such as Ultra-Violet Nanoimprint Lithography and soft-contact lithography.