Mechanical Sciences
Mechanical Sciences
Mechanical Sciences
Articles | Volume 9, issue 1
Articles | Volume 9, issue 1
https://doi.org/10.5194/ms-9-161-2018
© Author(s) 2018. This work is distributed under
the Creative Commons Attribution 4.0 License.
https://doi.org/10.5194/ms-9-161-2018
© Author(s) 2018. This work is distributed under
the Creative Commons Attribution 4.0 License.
Articles | Volume 9, issue 1
Research article
 | 
26 Mar 2018
Research article |  | 26 Mar 2018

Design and development of a novel monolithic compliant XY stage with centimeter travel range and high payload capacity

Shixun Fan, Hua Liu, and Dapeng Fan

Viewed

Total article views: 5,890 (including HTML, PDF, and XML)
HTML PDF XML Total BibTeX EndNote
4,585 1,217 88 5,890 114 177
  • HTML: 4,585
  • PDF: 1,217
  • XML: 88
  • Total: 5,890
  • BibTeX: 114
  • EndNote: 177
Views and downloads (calculated since 26 Mar 2018)
Cumulative views and downloads (calculated since 26 Mar 2018)

Viewed (geographical distribution)

Total article views: 5,365 (including HTML, PDF, and XML) Thereof 5,285 with geography defined and 80 with unknown origin.
Country # Views %
  • 1
1
 
 
 
 
Latest update: 07 Feb 2026
Download
Short summary
This article proposes a novel monolithic compliant spatial parallel XY stage (SPXYS). An important feature of the SPXYS lies in that it can deliver centimeter travel range and sustain large out-of-plane payload while possessing a compact structure, which makes the SPXYS suitable for some special applications such as Ultra-Violet Nanoimprint Lithography and soft-contact lithography.
Read more
Share