Mechanical Sciences
Mechanical Sciences
Mechanical Sciences
Articles | Volume 9, issue 1
Articles | Volume 9, issue 1
https://doi.org/10.5194/ms-9-161-2018
© Author(s) 2018. This work is distributed under
the Creative Commons Attribution 4.0 License.
https://doi.org/10.5194/ms-9-161-2018
© Author(s) 2018. This work is distributed under
the Creative Commons Attribution 4.0 License.
Articles | Volume 9, issue 1
Research article
 | 
26 Mar 2018
Research article |  | 26 Mar 2018

Design and development of a novel monolithic compliant XY stage with centimeter travel range and high payload capacity

Shixun Fan, Hua Liu, and Dapeng Fan

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Short summary
This article proposes a novel monolithic compliant spatial parallel XY stage (SPXYS). An important feature of the SPXYS lies in that it can deliver centimeter travel range and sustain large out-of-plane payload while possessing a compact structure, which makes the SPXYS suitable for some special applications such as Ultra-Violet Nanoimprint Lithography and soft-contact lithography.
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