Articles | Volume 8, issue 1
https://doi.org/10.5194/ms-8-117-2017
https://doi.org/10.5194/ms-8-117-2017
Research article
 | 
23 May 2017
Research article |  | 23 May 2017

Design and analysis of a 3-DOF planar micromanipulation stage with large rotational displacement for micromanipulation system

Bingxiao Ding, Yangmin Li, Xiao Xiao, Yirui Tang, and Bin Li

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Cited articles

Acer, M. and Sabanovic, A.: Micro position control of a designed 3-PRR compliant mechanism using experimental models, 9th Asian Control Conference, 1–6, 2013.
Bhagat, U., Shirinzadeh, B., Clark, L., Chea, P., Qin, Y. D., Tian, Y. L., and Zhang, D. W.: Design and analysis of a novel flexure-based 3-DOF mechanism, Mech. Mach. Theory, 7, 173–187, 2014.
Culpepper, M. L. and Anderson, G.: Design of a low-cost nano-manipulator which utilizes a monolithic, spatial compliant mechanism, Precision Engineering, 28, 469–482, 2004.
Dong, Y., Gao, F., and Yue, Y.: Modeling and experimental study of a novel 3-RPR parallel micro-manipulator, Robotics and Computer-IntegratedManufacturing, 37, 115–124, 2016.
Gao, F., Li, W. M., Zhao, X. C., Jin, Z. L., and Zhao, H.: New kinematic structures for 2-, 3-, 4-, and 5-DOF parallel manipulator designs, Mech. Mach. Theory, 37, 1395–1411, 2002.
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Short summary
A flexure-based monolithic micro manipulation stage with large workspace is designed and analyzed. The piezoelectric actuators are adopted to drive the manipulation stage. The optimized lever amplifier is integrated into the mechanism in order to compensate the stroke of the piezoelectric actuators. The working range of the manipulation stage along each axis is ± 42.31 μm, ± 48.56 μm, 0–10.28 m rad, respectively.