Mechanical Sciences
Mechanical Sciences
Mechanical Sciences
Articles | Volume 8, issue 1
Articles | Volume 8, issue 1
https://doi.org/10.5194/ms-8-117-2017
© Author(s) 2017. This work is distributed under
the Creative Commons Attribution 3.0 License.
https://doi.org/10.5194/ms-8-117-2017
© Author(s) 2017. This work is distributed under
the Creative Commons Attribution 3.0 License.
Articles | Volume 8, issue 1
Research article
 | 
23 May 2017
Research article |  | 23 May 2017

Design and analysis of a 3-DOF planar micromanipulation stage with large rotational displacement for micromanipulation system

Bingxiao Ding, Yangmin Li, Xiao Xiao, Yirui Tang, and Bin Li

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Short summary
A flexure-based monolithic micro manipulation stage with large workspace is designed and analyzed. The piezoelectric actuators are adopted to drive the manipulation stage. The optimized lever amplifier is integrated into the mechanism in order to compensate the stroke of the piezoelectric actuators. The working range of the manipulation stage along each axis is ± 42.31 μm, ± 48.56 μm, 0–10.28 m rad, respectively.
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