Articles | Volume 12, issue 1
https://doi.org/10.5194/ms-12-133-2021
© Author(s) 2021. This work is distributed under
the Creative Commons Attribution 4.0 License.
the Creative Commons Attribution 4.0 License.
Special issue:
https://doi.org/10.5194/ms-12-133-2021
© Author(s) 2021. This work is distributed under
the Creative Commons Attribution 4.0 License.
the Creative Commons Attribution 4.0 License.
Research on a UV-assisted chemical modification strategy for monocrystalline silicon
Yinghui Ren
CORRESPONDING AUTHOR
College of Mechanical and Vehicle Engineering, Hunan University, Changsha,
410082, China
Kexin Li
College of Mechanical and Vehicle Engineering, Hunan University, Changsha,
410082, China
Wei Li
CORRESPONDING AUTHOR
College of Mechanical and Vehicle Engineering, Hunan University, Changsha,
410082, China
Xu Han
College of Mechanical and Vehicle Engineering, Hunan University, Changsha,
410082, China
Xiaoman Liu
College of Mechanical and Vehicle Engineering, Hunan University, Changsha,
410082, China
Related subject area
Subject: Machining and Manufacturing Processes | Techniques and Approaches: Experiment and Best Practice
Study on cutting temperatures of SiCp ∕ Al composites for ultrasonic vibration-assisted cutting
Surface quality improvement for 316L additive manufactured prototype based on magnetorheological polishing
Short communication: Part contour error prediction based on LSTM neural network
Drilling performance analysis of impregnated micro bit
Short communication: Experiment study on micro-textured tool with internal cooling
The three-point eccentric magnetorheological polishing technology for hard brittle alumina ceramics
Experimental study of the tribological characteristics of a honed cylinder liner during the running-in process
Research on the smooth velocity control of a driving switching process of a new pneumatic electric hybrid actuator
Influence of geometric attributes on friction coefficient in sheet metal stamping
Industrial robot-based system design of thickness scanning measurement using ultrasonic
The effect of rubber powder additives on mechanical properties of polypropylene glass-fiber-reinforced composite
Experimental measurement of the cutting forces and wear of the drill in processing X17CrNi16-2 martensitic stainless steel
Formation mechanism analysis and experimental investigation of single-step printing customized circuits by liquid-metal direct writing
Interfacial microstructures and properties of hyper-eutectic Al–21Si / hypo-eutectic Al–7.5Si bimetallic material fabricated by liquid–liquid casting route
Investigation of drilling 2D Cf∕C–SiC composites with brazed diamond core drills
Statistical analysis of energy consumption, tool wear and surface roughness in machining of Titanium alloy (Ti-6Al-4V) under dry, wet and cryogenic conditions
Tool Wear Progression and its Effect on Energy Consumption in Turning of Titanium Alloy (Ti-6Al-4V)
Analysis of Burr Formation in Low Speed Micro-milling of Titanium Alloy (Ti-6Al-4V)
A modified ball screw lapping method and optimized lapping factors for ideal surface quality
A novel non-contact measuring system for the thread profile of a ball screw
Comparative experimental investigation and gap flow simulation in electrical discharge drilling using new electrode geometry
Study on the tool wear of 3-D elliptical vibration cutting
Friction Stir Welding of AA2024-T3 plate – the influence of different pin types
The influence of water jet diameter and bone structural properties on the efficiency of pure water jet drilling in porcine bone
Qingling Wu, Shuaijie Zhai, Yongsheng Du, Dong Yan, and Yakun Yang
Mech. Sci., 15, 293–304, https://doi.org/10.5194/ms-15-293-2024, https://doi.org/10.5194/ms-15-293-2024, 2024
Short summary
Short summary
In this study, to conduct and gain a deeper understanding of the cutting mechanism of SiCp / Al in ultrasonic vibration-assisted turning, this study established a prediction model for the cutting temperature field of SiCp / Al composite materials in UVAC cutting. At the same time, experiments were conducted on processing SiCp / Al composite materials using UVAC, turning SiCp/Al composite materials with a volume fraction of 25 %.
Na She, Tao Gong, Bingsan Chen, Minrui Lu, Yongchao Xu, and Xiaodong Peng
Mech. Sci., 14, 179–191, https://doi.org/10.5194/ms-14-179-2023, https://doi.org/10.5194/ms-14-179-2023, 2023
Short summary
Short summary
In this study, magnetorheological finishing was used to polish the surface of a 316L stainless steel sample formed by powder bed laser melting. After polishing, the pits and scratches on the surface of 316L stainless steel sample disappear. Thus, the method could realize nano-machining, and it has great polishing potential.
Yun Zhang, Guangshun Liang, Cong Cao, Yun Zhang, and Yan Li
Mech. Sci., 14, 15–18, https://doi.org/10.5194/ms-14-15-2023, https://doi.org/10.5194/ms-14-15-2023, 2023
Short summary
Short summary
A contour error prediction model based on LSTM (long short-term memory) is established. By inputting power, vibration signal, and temperature values, the contour error of parts can be predicted to adjust the feed speed in real time. In this way, we can obtain not only higher machining accuracy, but also higher machining efficiency and reduce the scrap rate. The model is compared with other models, and the optimal model is selected to obtain the optimal prediction effect.
Dongdong Song, Zhangping Ren, Yingxin Yang, Yousheng Chen, Gao Nie, Leichuan Tan, Hao Peng, Zijie Li, Xiaojing Chen, Meng Li, Haitao Ren, and Long Zuo
Mech. Sci., 13, 867–875, https://doi.org/10.5194/ms-13-867-2022, https://doi.org/10.5194/ms-13-867-2022, 2022
Short summary
Short summary
This paper studies the rock breaking efficiency and wear resistance under different rock samples by researching the particle size and concentration of diamond cutting elements, and obtains the influence law of particle size and concentration on rock breaking efficiency and wear resistance under different rock samples. The research results have guiding significance for the design of impregnated diamond in high abrasive and difficult formations.
Gang Yang and Wei Feng
Mech. Sci., 13, 619–623, https://doi.org/10.5194/ms-13-619-2022, https://doi.org/10.5194/ms-13-619-2022, 2022
Short summary
Short summary
Under the condition of high temperature, high pressure and severe friction, the micro-texture hole or groove will be filled with chips quickly and lose its function. The texture with a larger aperture is made on the tool rake face, which is connected with the internal cooling hole so as to achieve the functions of cooling, lubricating, reducing friction, changing chip state, reducing cutting force, prolonging tool life and reducing production cost during rough machining.
Cheng Zheng, Bingsan Chen, Xiaoyu Yan, Yongchao Xu, and Shangchao Hung
Mech. Sci., 13, 473–483, https://doi.org/10.5194/ms-13-473-2022, https://doi.org/10.5194/ms-13-473-2022, 2022
Short summary
Short summary
Due to the high hardness of alumina ceramics, the gap in magnetorheological polishing efficiency is very low. The three-point magnetorheological polishing method is designed, which has a strong magnetic field generator and pressure polishing characteristics. The surface microstructure and surface quality of the polished alumina ceramics under different process parameters were studied, and the optimal process parameters were obtained by analysis.
Jianxiong Kang, Yanjun Lu, Bin Zhao, Cheng Jiang, Pengzhou Li, Hongbo Luo, and Yongfang Zhang
Mech. Sci., 13, 101–110, https://doi.org/10.5194/ms-13-101-2022, https://doi.org/10.5194/ms-13-101-2022, 2022
Short summary
Short summary
In order to improve the antiwear performance of the cylinder liner, friction and wear during the running-in process are investigated. Friction and wear tests are designed under different operating conditions, and the coefficient of friction (COF) and surface profile are measured. The influences of load and runtime on the COF and surface morphology are serious, and proper loading can reduce the running-in time. This research can provide support for theoretical research on cylinder liners.
Jiabin Yang and Xiaoning Li
Mech. Sci., 12, 971–982, https://doi.org/10.5194/ms-12-971-2021, https://doi.org/10.5194/ms-12-971-2021, 2021
Short summary
Short summary
The new pneumatic–electric hybrid actuator with pneumatic and electric driving modes has the problem of speed fluctuation in the process of driving switching. This affects the stability in the positioning process. In order to solve this problem, the motion characteristics of piston rod in pneumatic locking are studied. A relay and run strategy is proposed to solve the problem of speed fluctuation.
Dewang Zhao, Kunmin Zhao, Huaihao Song, Daxin Ren, and Ying Chang
Mech. Sci., 12, 945–958, https://doi.org/10.5194/ms-12-945-2021, https://doi.org/10.5194/ms-12-945-2021, 2021
Short summary
Short summary
A universal test-machine-based mechanically driven friction device was designed and manufactured. Friction tests were conducted on a third-generation high-strength steel QP980 with flat and curved dies at different pulling speeds and clamping forces. The formula for calculating the friction coefficients between curved contact surfaces was derived.
Haibo Liu, Baoliang Liu, Meng Lian, Pingping Li, Tianran Liu, Te Li, and Yongqing Wang
Mech. Sci., 12, 479–486, https://doi.org/10.5194/ms-12-479-2021, https://doi.org/10.5194/ms-12-479-2021, 2021
Short summary
Short summary
This paper presents an industrial robot-aided ultrasonic thickness measurement system to meet the needs of precise and efficient wall thickness measurement of large thin-walled parts. The hardware platform of the system is established with the designed reliable and contactless ultrasonic device integrated into an industrial robot. It was experimentally proven that the proposed method has a positive significance for improving the accuracy and efficiency of thickness measurement.
Abdelaal M. Elhousari, Maher Rashad, Ammar H. Elsheikh, and Montasser Dewidar
Mech. Sci., 12, 461–469, https://doi.org/10.5194/ms-12-461-2021, https://doi.org/10.5194/ms-12-461-2021, 2021
Adrian Sorin Rosca, Nicolae Craciunoiu, Ionut Daniel Geonea, and Leonard Ciurezu Gherghe
Mech. Sci., 12, 269–287, https://doi.org/10.5194/ms-12-269-2021, https://doi.org/10.5194/ms-12-269-2021, 2021
Short summary
Short summary
This paper presents the design of a dynamometer, with a one-spoked wheel elastic component, to measure the drilling thrust force and drilling moment. After manufacturing, a calibration operation is conducted, and tests are performed by measuring the drilling forces, thrust, and torque on American Iron and Steel Institute (AISI) 1020 steel. Tool wear is studied, and the results are presented in the paper. Obtained results demonstrate the efficiency and accuracy of this measuring instrument.
Yan Pu Chao, Hao Yi, Hui Cen, and Yao Hui Li
Mech. Sci., 12, 143–154, https://doi.org/10.5194/ms-12-143-2021, https://doi.org/10.5194/ms-12-143-2021, 2021
Short summary
Short summary
Liquid-metal direct writing is a cost-effective and green technology, which is very promising for the customized fabrication of flexible circuits and functional devices. The smooth flowing and conveying of liquid-metal ink are still huge challenges that need significant attention. In this paper, the force mechanism of liquid-metal ink transported by ball rotation and translation of the printing head was analyzed. The flexible complex circuit and functional electronic pattern were printed.
Mohamed Ramadan and Abdulaziz S. Alghamdi
Mech. Sci., 11, 371–379, https://doi.org/10.5194/ms-11-371-2020, https://doi.org/10.5194/ms-11-371-2020, 2020
Qiong Liu, Guoqin Huang, and Yongchao Xu
Mech. Sci., 11, 349–356, https://doi.org/10.5194/ms-11-349-2020, https://doi.org/10.5194/ms-11-349-2020, 2020
Muhammad Ali Khan, Syed Husain Imran Jaffery, Mushtaq Khan, Muhammad Younas, Shahid Ikramullah Butt, Riaz Ahmad, and Salman Sagheer Warsi
Mech. Sci., 10, 561–573, https://doi.org/10.5194/ms-10-561-2019, https://doi.org/10.5194/ms-10-561-2019, 2019
Short summary
Short summary
The paper provides a comparative study of dry, wet and cryogenic turning of Ti-6Al-4V. Usually, it is recommended that titanium should be machined under lubrication, however, conventional lubricants are considered carcinogenic and health hazards. In this regard, cryogenic cooling using liquid Nitrogen provides an environment friendly option to machine Titanium based alloys.
Muhammad Younas, Syed Husain Imran Jaffery, Mushtaq Khan, Riaz Ahmad, Liaqat Ali, Zarak Khan, and Aftab Khan
Mech. Sci., 10, 373–382, https://doi.org/10.5194/ms-10-373-2019, https://doi.org/10.5194/ms-10-373-2019, 2019
Short summary
Short summary
This research work correlates the wear progression and Specific Cutting Energy (SCE) in turning Ti-6Al-4V alloy using H13 tools (uncoated carbide) in dry conditions from low to high cutting speeds. Flank wear growth of the tool has been investigated at different length of cuts in correlation with the SCE under different cutting conditions. The useful tool life was found to be shorter at high-speed machining conditions, as compared to low-speed machining conditions.
Gulfam Ul Rehman, Syed Husain Imran Jaffery, Mushtaq Khan, Liaqat Ali, Ashfaq Khan, and Shahid Ikramullah Butt
Mech. Sci., 9, 231–243, https://doi.org/10.5194/ms-9-231-2018, https://doi.org/10.5194/ms-9-231-2018, 2018
Short summary
Short summary
The research into micro machining of advanced alloys finds its applications in the aerospace, automotive, biomedical and healthcare and other industrial areas. One of the major concern is to produce parts at micro level without further rework, specifically surface finish. In order to achieve this, suitable process parameters and machining strategy needs to be identified for advanced alloy. The research presented here focuses on this aspect of the machining of Titanium Alloy.
Leilei Zhao, Hutian Feng, and Jun Jin
Mech. Sci., 9, 221–230, https://doi.org/10.5194/ms-9-221-2018, https://doi.org/10.5194/ms-9-221-2018, 2018
Short summary
Short summary
The aim of this study is finding a modified lapping method to improve the lapping effect, increase efficiency and change the present labor-intensive situation. In this study, a modified lapping tool was designed and it was designed to fit on a specially designed friction torque test machine. In addition, a set of orthogonal experiments were designed to capture the effects of four main lapping factors: friction torque, abrasive particulate size, lapping time and the rotational speed.
Leilei Zhao, Hutian Feng, and Qianfeng Rong
Mech. Sci., 9, 15–24, https://doi.org/10.5194/ms-9-15-2018, https://doi.org/10.5194/ms-9-15-2018, 2018
Short summary
Short summary
An automatic, non-contact measuring system for the thread profile of a ball screw was developed. It is capable of measuring most common features of the ball screw thread profile and can measure ball screws of different sizes and lengths. The accuracy of the measuring system was verified by comparing the image from the system with the image from the reference instrument and then, different ball screws were compared and evaluated, which was the main purpose of designing such a measuring system.
Ali Tolga Bozdana and Nazar Kais Al-Karkhi
Mech. Sci., 8, 289–298, https://doi.org/10.5194/ms-8-289-2017, https://doi.org/10.5194/ms-8-289-2017, 2017
Short summary
Short summary
This work investigates the effect of electrode geometry on flushing capability and debris removal efficiency in Electrical Discharge Drilling process. Drilling operations on stainless steel 304 were performed using circular and side-cut electrodes. Experimental results were compared with respect to drilling performance as well as dimensional accuracy and surface quality of drilled holes. Three-phase three-dimensional CFD models were also developed to analyze the flow field at interelectrode gap.
Jieqiong Lin, Xian Jing, Mingming Lu, Yan Gu, and Jinguo Han
Mech. Sci., 8, 215–220, https://doi.org/10.5194/ms-8-215-2017, https://doi.org/10.5194/ms-8-215-2017, 2017
Short summary
Short summary
The formation principle of 3-D cutting elliptical trajectory was analysed and a prediction model of tool wear was established in the present work. Besides, a self-developed three-dimensional elliptical vibration device was employed to conduct turning experiment. Compared with the proposed model, the experimental results showed a great agreement with the proposed prediction model. This work may provide a reference for the further optimization of the 3-D elliptical vibration cutting parameters.
D. Trimble, H. Mitrogiannopoulos, G. E. O'Donnell, and S. McFadden
Mech. Sci., 6, 51–55, https://doi.org/10.5194/ms-6-51-2015, https://doi.org/10.5194/ms-6-51-2015, 2015
S. den Dunnen and G. J. M. Tuijthof
Mech. Sci., 5, 53–58, https://doi.org/10.5194/ms-5-53-2014, https://doi.org/10.5194/ms-5-53-2014, 2014
Cited articles
Aida, H., Doi, T., Takeda, H., Katakura, H., Kim, S. W., Koyama, K.,
Yamazaki, Y., and Uneda, M.: Ultraprecision CMP for sapphire, GaN, and SiC
for advanced optoelectronics materials, Curr. Appl. Phys., 12, 41–46,
https://doi.org/10.1016/j.cap.2012.02.016, 2012.
Alamgir, A., Bogatov, A., Yashin, M., and Podgursky, V.: Mechanical and
tribological properties of 100-nm thick alumina films prepared by atomic
layer deposition on Si(100) substrates, P. Est. Acad. Sci., 68, 126–130,
https://doi.org/10.3176/proc.2019.2.01, 2019.
Aurich, J. C., Carrella, M., and Walk, M.: Micro grinding with ultra-small
micro pencil grinding tools using an integrated machine tool, CIRP
Ann-Manuf. Techn., 64, 325–328, https://doi.org/10.1016/j.cirp.2015.04.011, 2015.
Aurich, J. C., Kirsch, B., Setti, D., Axinte, D., and Yamaguchi, H.:
Abrasive processes for micro parts and structures, CIRP Ann-Manuf. Techn.,
68, 653–676, https://doi.org/10.1016/j.cirp.2019.05.006, 2019.
Ishimarua, D., Tougea, M., Mutaa, H., Kubotaa, A., Sakamoto, T., and
Sakamoto, S.: Burr Suppression Using Sharpened Pcd Cutting Edge by
Ultraviolet-Ray Irradiation Assisted Polishing, Procedia CIRP, 1, 184–189,
https://doi.org/10.1016/j.procir.2012.04.032, 2012.
Kubota, A., Kurihara, K., and Touge, M.: Fabrication of Smooth Surface on
4H-SiC Substrate by Ultraviolet Assisted Local Polishing in Hydrogen
Peroxide Solution, Key Eng. Mater., 523, 24–28, 2012a.
Kubota, A., Yoshimura, M., Fukuyama, S., Iwamoto, C., and Touge, M.:
Planarization of C-face 4H-SiC substrate using Fe particles and hydrogen
peroxide solution, Precis. Eng., 36, 137–140,
https://doi.org/10.1016/j.precisioneng.2011.09.003, 2012b.
Li, C., Zhang, F. H., Meng, B. B., Liu, L. F., and Rao, X. S.: Material
removal mechanism and grinding force modelling of ultrasonic vibration
assisted grinding for SiC ceramics, Ceram. Int., 43, 2981–2993,
https://doi.org/10.1016/j.ceramint.2016.11.066, 2017.
Li, W., Chen, Q. D., Ren, Y. H., Jiao, Y., and Ibrahim, A. M. M.: Hybrid
micro-grinding process for manufacturing meso/micro-structures on
monocrystalline silicon, Mater. Manuf. Process, 36, 17–26,
https://doi.org/10.1080/10426914.2020.1813890, 2020.
Lu, C., Qiu, Z. J., Yi, P., and Yang, X.: Trial Production of Special
Grinding Fluid for Efficient and Precise Quartz Glass Grinding, J. Mater.
Sci. Eng., 31, 794–798, https://doi.org/10.14136/j.cnki.issn1673-2812.2013.06.012,
2013.
Lu, J. B., Chen, R., Liang H. Z., and Yan Q. S.: The influence of
concentration of hydroxyl radical on the chemical mechanical polishing of
SiC wafer based on the Fenton reaction, Precis. Eng., 52, 221–226,
https://doi.org/10.1016/j.precisioneng.2017.12.011, 2017.
Muhammad, A., Zhang, X. Q., Mustafizur, R., and Kumar, S.: A predictive
model of the critical undeformed chip thickness for ductile-brittle
transition in nano-machining of brittle materials, Int. J. Mach. Tool Manu.,
64, 114–122, https://doi.org/10.1016/j.ijmachtools.2012.08.005, 2013.
Qiu, Z. J., Zhou, L. B., Fang, F. Z., Shina, T., and EDA, H.: Chemical
mechanical grinding for quartz glass, Optics Precis. Eng., 18,
1554–1561, https://doi.org/10.3788/OPE.20101807.1554, 2010.
Qiu, Z. J., Yi, P., Lu, C., and Fang, F. Z.: Mechanical Property Analysis of
Modified Quartz Glass, J. Mater. Sci. Eng., 31, 6–10,
https://doi.org/10.14136/j.cnki.issn1673-2812.2013.01.015, 2013.
Xu, M.: A spectroscopic study on the decomposition of magnesium silicate by
alkali fusion using NaOH, PhD thesis, Northeastern University, Shenyang,
132 pp., 2014.
Ye, Z. F., Zhou, Y., Xu, L., and Pan, G. S.: Chemical mechanical polishing
of 4H-SiC wafer with UV-LED light, Nanotechnol. Precis. Eng., 15,
342–346, https://doi.org/10.13494/j.npe.20170005, 2017.
Yuan, J. L., Zhang, F. H., Dai, Y. F., Kang, R. K., Yang, H., and Lv, B. H.:
Development Research of Science and Technologies in Ultra-precision
Machining Field, J. Mech. Eng., 46, 161–177,
https://doi.org/10.3901/JME.2010.15.161, 2010.
Zhang, N. D., Zheng, W., Huang, J. L.: The application of
UV-Vis/H2O2/ferrioxalate in wastewater treatment, Photographic
Sci. Photoch., 21, 72–78, https://doi.org/10.7517/j.issn.1674-0475.2003.01.72, 2003.
Zhou, L. B., Shiina, T., Qiu, Z. J., Shimizu, J., Yamamoto, T., and Tashiro,
T.: Research on chemo-mechanical grinding of large size quartz glass
substrate, Precis. Eng., 33, 499–504,
https://doi.org/10.1016/j.precisioneng.2009.01.006, 2009.
Zhou, Y., Pan, G. S., Shi, X. L., Gong, H., Luo, G. H., and Gu, Z. H.:
Chemical mechanical planarization (CMP) of on-axis Si-face SiC wafer using
catalyst nanoparticles in slurry, Surf. Coat. Tech., 251, 48–55,
https://doi.org/10.1016/j.surfcoat.2014.03.044, 2014.
Short summary
In order to improve modification effectiveness, a novel UV-assisted chemical modification (UVA-CM) strategy is proposed based on UV photocatalytic theory, which contributes to developing a novel hybrid chemo-mechanical process monocrystalline silicon. A series of comparative experiments was performed to evaluate modification effectiveness among different strategies. The results show that the liquid–solid chemical modification effect is obviously enhanced through UV advanced oxidation reactions.
In order to improve modification effectiveness, a novel UV-assisted chemical modification...
Special issue