5 citations as recorded by crossref.

1. Investigation of mechanical force acting on the surface modified-substrate layer area during the chemical-mechanical micro-grinding of monocrystalline silicon W. Li et al. 10.1016/j.ijmecsci.2022.107482
2. Study on OH radical oxidation of 4H-SiC in plasma based on ReaxFF molecular dynamics simulation D. Yan et al. 10.1016/j.molliq.2024.124573
3. A hybrid chemical modification strategy for monocrystalline silicon micro-grinding: Experimental investigation and synergistic mechanism Y. REN et al. 10.1016/j.cja.2022.11.004
4. Ultra-precision diamond finishing of reaction-sintered silicon carbide enhanced by vibration-assisted photocatalytic oxidation Z. Geng et al. 10.1016/j.jmatprotec.2024.118527
5. Modelling and grinding characteristics of unidirectional C–SiCs S. Qu et al. 10.1016/j.ceramint.2021.12.036