Mechanical Sciences
Mechanical Sciences
Mechanical Sciences
Articles | Volume 13, issue 1
Articles | Volume 13, issue 1
https://doi.org/10.5194/ms-13-311-2022
© Author(s) 2022. This work is distributed under
the Creative Commons Attribution 4.0 License.
https://doi.org/10.5194/ms-13-311-2022
© Author(s) 2022. This work is distributed under
the Creative Commons Attribution 4.0 License.
Articles | Volume 13, issue 1
Research article
 | 
01 Apr 2022
Research article |  | 01 Apr 2022

Analytical model establishment and attitude calculation of a parallel leaf-spring carrying mechanism

Peng Li, Zheng-Rong Tong, and Wei-Hua Zhang

Viewed

Total article views: 918 (including HTML, PDF, and XML)
HTML PDF XML Total BibTeX EndNote
726 168 24 918 21 21
  • HTML: 726
  • PDF: 168
  • XML: 24
  • Total: 918
  • BibTeX: 21
  • EndNote: 21
Views and downloads (calculated since 01 Apr 2022)
Cumulative views and downloads (calculated since 01 Apr 2022)

Viewed (geographical distribution)

Total article views: 843 (including HTML, PDF, and XML) Thereof 843 with geography defined and 0 with unknown origin.
Country # Views %
  • 1
1
 
 
 
 

Cited

Latest update: 13 Dec 2024
Download
Short summary
A novel parallel leaf-spring carrying mechanism was designed and studied for high-precision fast wafer positioning and transfer in lithography. Displacement was used to calculate the equilibrium attitude, and the laser triangulation coordinate method was used for attitude measurement. The effectiveness of the attitude model was shown by numerical analysis and experimental verification. The methods can be used as a reference for the analysis and design of a complex parallel compliant mechanism.
Read more