Mechanical Sciences
Mechanical Sciences
Mechanical Sciences
Articles | Volume 13, issue 1
Articles | Volume 13, issue 1
https://doi.org/10.5194/ms-13-311-2022
© Author(s) 2022. This work is distributed under
the Creative Commons Attribution 4.0 License.
https://doi.org/10.5194/ms-13-311-2022
© Author(s) 2022. This work is distributed under
the Creative Commons Attribution 4.0 License.
Articles | Volume 13, issue 1
Research article
 | 
01 Apr 2022
Research article |  | 01 Apr 2022

Analytical model establishment and attitude calculation of a parallel leaf-spring carrying mechanism

Peng Li, Zheng-Rong Tong, and Wei-Hua Zhang

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Short summary
A novel parallel leaf-spring carrying mechanism was designed and studied for high-precision fast wafer positioning and transfer in lithography. Displacement was used to calculate the equilibrium attitude, and the laser triangulation coordinate method was used for attitude measurement. The effectiveness of the attitude model was shown by numerical analysis and experimental verification. The methods can be used as a reference for the analysis and design of a complex parallel compliant mechanism.
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