Articles | Volume 12, issue 1
https://doi.org/10.5194/ms-12-97-2021
https://doi.org/10.5194/ms-12-97-2021
Research article
 | 
04 Feb 2021
Research article |  | 04 Feb 2021

Optimal design and experimental study of fixed abrasive pads based on coupling of damping regulation and pellet arrangement

Chaoqun Xu, Congfu Fang, Yuan Li, and Chong Liu

Related subject area

Subject: Machining and Manufacturing Processes | Techniques and Approaches: Optimization
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Cited articles

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Dong, Z. C. and Cheng, H. B.: Study on removal mechanism and removal characters for SiC and fused silica by fixed abrasive diamond pellets, Int. J. Mach. Tool. Manu., 85, 1–13, https://doi.org/10.1016/j.ijmachtools.2014.04.008, 2014. 
Fang, C. F., Zhao, Z. X., Lu, L. Y., and Lin, Y. F.: Influence of fixed abrasive configuration on the polishing process of silicon wafers, Int. J. Mach. Tool. Manu., 88, 1–10, https://doi.org/10.1007/s00170-016-8808-9, 2017. 
Fang, C. F., Liu, C., Zhao, Z. X., Lin, Y. F., Hu, Z. W., and Xu, X. P.: Study on geometrical patterns of textured fixed-abrasive pads in sapphire lapping based on trajectory analysis, Precis. Eng., 53, 169–178, 2018.