Articles | Volume 12, issue 1
https://doi.org/10.5194/ms-12-97-2021
© Author(s) 2021. This work is distributed under the Creative Commons Attribution 4.0 License.
Special issue:
Research article
| 
04 Feb 2021
Research article |
| 04 Feb 2021
| 04 Feb 2021
Optimal design and experimental study of fixed abrasive pads based on coupling of damping regulation and pellet arrangement
Cited articles
Arunachalam, A. P. S., Idapalapati, S., and Subbiah, S.:
Multi-criteria decision-making techniques for compliant polishing tool selection,
Int. J. Adv. Manuf. Tech.,
79, 519–530, https://doi.org/10.1007/s00170-015-6822-y, 2015.
Belkhir, N., Aliouane, T., and Bouzid, D.:
Correlation between contact surface and friction during the optical glass polishing,
Appl. Surf. Sci.,
288, 208–214, https://doi.org/10.1016/j.apsusc.2013.10.008, 2013.
Dong, Z. C. and Cheng, H. B.:
Study on removal mechanism and removal characters for SiC and fused silica by fixed abrasive diamond pellets,
Int. J. Mach. Tool. Manu.,
85, 1–13, https://doi.org/10.1016/j.ijmachtools.2014.04.008, 2014.
Fang, C. F., Zhao, Z. X., Lu, L. Y., and Lin, Y. F.:
Influence of fixed abrasive configuration on the polishing process of silicon wafers,
Int. J. Mach. Tool. Manu.,
88, 1–10, https://doi.org/10.1007/s00170-016-8808-9, 2017.
Fang, C. F., Liu, C., Zhao, Z. X., Lin, Y. F., Hu, Z. W., and Xu, X. P.:
Study on geometrical patterns of textured fixed-abrasive pads in sapphire lapping based on trajectory analysis,
Precis. Eng.,
53, 169–178, 2018.
