Articles | Volume 2, issue 2
https://doi.org/10.5194/ms-2-157-2011
https://doi.org/10.5194/ms-2-157-2011
Research article
 | 
04 Aug 2011
Research article |  | 04 Aug 2011

Review Article: Inventory of platforms towards the design of a statically balanced six degrees of freedom compliant precision stage

A. G. Dunning, N. Tolou, and J. L. Herder

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Cited articles

Ananthasuresh, G. K. and Kota, S.: Designing compliant mechanisms, Mech. Eng., 117, 93–96, 1995.
Anderson, G. A. B.: A six degree of freedom flexural positioning stage, M.S. thesis, Massachusetts Institute of Technology, Cambridge, USA, 136 pp., 2003.
Brouwer, D. M., de Jong, B. R., and Soemers, H. M. J. R.: Design and modeling of a six DOFs MEMS-based precision manipulator, Precis. Eng., 34, 307–319, 2010.
Chang, S. H., Tseng, C. K., and Chien, H. C.: An ultra-precision XY$\theta $z piezo-micropositioner part I: Design and analysis, IEEE T. Ultrason. Ferr., 46, 897–905, 1999a.
Chang, S. H., Tseng, C. K., and Chien, H. C.: An ultra-precision XYθz piezo-micropositioner part II: Experiment and performance, IEEE T. Ultrason. Ferr., 46, 906–912, 1999b.