The low-dimensional electron systems made from semiconductor heterostructures are known mostly as a base for studying the mesoscopic electron-transport phenomena. However, they can also be used for creation of nanoelectromechanical systems combining non-trivial electron transport and mechanical degrees of freedom. In the present paper, we propose a quantitative physical model describing the piezoelectric electromechanical coupling in nanomechanical resonators with a two-dimensional electron gas.

This paper presents the automated testing of accelerometer transverse sensitivity with a flexure-based compliant stage. An experimental platform is set up, and the circular tracking error is first obtained to verify the feasibility of the stage. The transverse sensitivity of the accelerometer under test is below 3 %. The difference of the transverse sensitivity under various frequencies is 0.4 %, while the difference of measured direction angle is 2.49, which validates the accuracy of the method.

This paper presents the output decoupling property of flexure-based mechanisms. The model shows that mechanisms are output decoupled when they are symmetry about two perpendicular axes or when they are composed of either three or an even number of identical limbs distributed evenly around the center. The results obtained from the proposed model and FEA are almost same, which validates the model. It provides a reference point for further studies on the design and optimization of mechanisms.

The study provides contributions to motion control systems with friction, especially for micro-motion systems. Five most used friction models in the micro-motion systems were compared. The plausible reasons for the difference in performance among these models applied in micro stick-slip motion were discussed. This study also demonstrates an idea of using displacement measurement of micro motion system and system identification technique to investigate the dynamic friction in micro motion level.