Articles | Volume 17, issue 1
https://doi.org/10.5194/ms-17-157-2026
© Author(s) 2026. This work is distributed under the Creative Commons Attribution 4.0 License.
Research article
| 
02 Mar 2026
Research article |
| 02 Mar 2026
| 02 Mar 2026
Simulation of an electro-hydraulic servo valve driven by an ultrasonic motor
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Chen, L., Zhang, C., Jin, B., and Yuan, T.: Simulation and experimental research on steady flow force compensation for a servo proportional valve, Flow Measurement and Instrumentation, 94, 854–866, https://doi.org/10.1016/j.flowmeasinst.2023.102457, 2023.
Fan, Z., Fan, J., and Yu, X.: An indirect flow measurement based high-precision slide valve grinding mechanism for hydraulic servo valve, Measurement Sience and Technology, 34, 77–84, https://doi.org/10.1088/1361-6501/ac94ee, 2023.
Gao, B., Zhang, W., and Zheng, L.: Research on High-Precision Position Control of Valve-Controlled Cylinders Based on Variable Structure Control, Machines, 11, 645–654, https://doi.org/10.3390/machines11060623, 2023.
Gao, Q., Li, L., and Zhu, Y.: Performance analysis of a high-frequency two-stage proportional valve piloted by two high-speed on/off valve arrays, Transactions of the Canadian Society for Mechanical Engineering, 13, 399–408, https://doi.org/10.1139/tcsme-2024-0079, 2024.
Guo, K., Li, M., and Shi, W.: Adaptive Tracking Control of Hydraulic Systems With Improved Parameter Convergence, IEEE Transactions on Industrial Electronics, 69, 7140–7150, https://doi.org/10.1109/TIE.2021.3101006, 2022.
