Simulation of an electro-hydraulic servo valve driven by an ultrasonic motor

Niu, Ruikun; Zhou, Boguo; Pan, Zhengyang

doi:10.5194/ms-17-157-2026

Articles | Volume 17, issue 1

https://doi.org/10.5194/ms-17-157-2026

© Author(s) 2026. This work is distributed under
the Creative Commons Attribution 4.0 License.

https://doi.org/10.5194/ms-17-157-2026

© Author(s) 2026. This work is distributed under
the Creative Commons Attribution 4.0 License.

Articles | Volume 17, issue 1

Research article

|

02 Mar 2026

Research article |

| 02 Mar 2026

Simulation of an electro-hydraulic servo valve driven by an ultrasonic motor

Ruikun Niu, Boguo Zhou, and Zhengyang Pan

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Cumulative views and downloads (calculated since 02 Mar 2026)

Month	HTML	PDF	XML	Total
Mar 2026	118	39	12	169
Apr 2026	92	29	15	136
May 2026	86	22	12	120
Jun 2026	13	5	1	19
Jul 2026	36	8	2	46
Aug 2026	49	9	2	60
Sep 2026	71	40	13	124

Latest update: 27 Sep 2026

Short summary

Traditional electro-hydraulic servo valves are driven by electromagnets, which are susceptible to interference and have poor dynamic performance, severely limiting flow control accuracy. To address this issue, a hollow ultrasonic motor was designed to drive the servo valve via a ball screw. The results show that the system has good robustness and anti-interference capabilities, enabling precise control of the valve spool displacement.