Mechanical Sciences
Mechanical Sciences
Mechanical Sciences
Articles | Volume 17, issue 1
Articles | Volume 17, issue 1
https://doi.org/10.5194/ms-17-157-2026
© Author(s) 2026. This work is distributed under
the Creative Commons Attribution 4.0 License.
https://doi.org/10.5194/ms-17-157-2026
© Author(s) 2026. This work is distributed under
the Creative Commons Attribution 4.0 License.
Articles | Volume 17, issue 1
Research article
 | 
02 Mar 2026
Research article |  | 02 Mar 2026

Simulation of an electro-hydraulic servo valve driven by an ultrasonic motor

Ruikun Niu, Boguo Zhou, and Zhengyang Pan

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Short summary
Traditional electro-hydraulic servo valves are driven by electromagnets, which are susceptible to interference and have poor dynamic performance, severely limiting flow control accuracy. To address this issue, a hollow ultrasonic motor was designed to drive the servo valve via a ball screw. The results show that the system has good robustness and anti-interference capabilities, enabling precise control of the valve spool displacement.
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