Displacement amplification ratio modeling of bridge-type nano-positioners with input displacement loss
Jinyin Li,Peng Yan,and Jianming Li
Jinyin Li
Key Laboratory of High-efficiency and Clean Mechanical Manufacturing, Ministry of Education, School of Mechanical Engineering, Shandong University, Jinan 250061, China
Key Laboratory of High-efficiency and Clean Mechanical Manufacturing, Ministry of Education, School of Mechanical Engineering, Shandong University, Jinan 250061, China
Key Laboratory of Precision Microelectronic Manufacturing Technology & Equipment of Ministry of Education, Guangdong University of Technology, Guangzhou 510006, China
Jianming Li
Key Laboratory of High-efficiency and Clean Mechanical Manufacturing, Ministry of Education, School of Mechanical Engineering, Shandong University, Jinan 250061, China
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To better help the mechanical design and structural optimization of bridge-type nano-positioners, an improved model was developed to describe the displacement amplification of the bridge-type mechanism in this paper. Comparative studies and experiments indicate that the proposed method can better capture the amplification performance for such systems, which can be potentially used in the design and optimization of bridge-type nano-positioners.
To better help the mechanical design and structural optimization of bridge-type...