Articles | Volume 9, issue 2
https://doi.org/10.5194/ms-9-417-2018
https://doi.org/10.5194/ms-9-417-2018
Research article
 | 
21 Nov 2018
Research article |  | 21 Nov 2018

Design and optimization of full decoupled micro/nano-positioning stage based on mathematical calculation

Zhigang Wu, Yangmin Li, and Min Hu

Viewed

Total article views: 3,669 (including HTML, PDF, and XML)
HTML PDF XML Total BibTeX EndNote
3,010 609 50 3,669 41 43
  • HTML: 3,010
  • PDF: 609
  • XML: 50
  • Total: 3,669
  • BibTeX: 41
  • EndNote: 43
Views and downloads (calculated since 21 Nov 2018)
Cumulative views and downloads (calculated since 21 Nov 2018)

Viewed (geographical distribution)

Total article views: 2,960 (including HTML, PDF, and XML) Thereof 2,907 with geography defined and 53 with unknown origin.
Country # Views %
  • 1
1
 
 
 
 

Cited

Latest update: 22 Nov 2024
Download
Short summary
This paper is done based on the research result for my research program. Testing results indicate that the maximal cross coupling of the 2-DOF micro-positioning stage is less than 0.1% under the full workspace with the natural frequency of 348.31Hz. The purpose of all work is to design a compliant mechanism for applying the micro-nano-positioning system. And that this work also extends my research interest in my PhD period.