Articles | Volume 9, issue 2
https://doi.org/10.5194/ms-9-417-2018
© Author(s) 2018. This work is distributed under the Creative Commons Attribution 4.0 License.
Design and optimization of full decoupled micro/nano-positioning stage based on mathematical calculation
Viewed
Total article views: 5,168 (including HTML, PDF, and XML)
Views and downloads (calculated since 21 Nov 2018)
Cumulative views and downloads
(calculated since 21 Nov 2018)
Cited
Latest update: 02 Sep 2026